Shave-off depth profiling: Depth profiling with an absolute depth scale

Nojima, M. / Maekawa, A. / Yamamoto, T. et al. | British Library Online Contents | 2006

Shave-off vector profiling for TEM samples

Nojima, M. / Fujii, M. / Ishizaki, Y. et al. | British Library Online Contents | 2008

Charge neutralization using secondary electron shower for shave-off depth profiling by focused ion beam secondary ion mass spectrometry

Ishizaki, Y. / Yamamoto, T. / Fujii, M. et al. | British Library Online Contents | 2008

Accurate depth profiling for ultra-shallow implants using backside-SIMS

Hongo, C. / Tomita, M. / Takenaka, M. | British Library Online Contents | 2004

Arsenic shallow depth profiling: accurate quantification in SiO~2/Si stack

Barozzi, M. / Giubertoni, D. / Anderle, M. et al. | British Library Online Contents | 2004