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Effect of filament temperature on HWCVD deposited a-SiC:H
Effect of filament temperature on HWCVD deposited a-SiC:H
Effect of filament temperature on HWCVD deposited a-SiC:H
Swain, B. P. (author) / Dusane, R. O. (author)
MATERIALS LETTERS ; 60 ; 2915-2919
2006-01-01
5 pages
Article (Journal)
English
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