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    A Monte Carlo simulation of silicon nitride thin film microstructure in ultraviolet localized-chemical vapor deposition

    New search for: Flicstein, J.
    New search for: Pata, S.
    New search for: Le Solliec, J. M.
    New search for: Chun, L. S. H. K.
    New search for: Palmier, J. F.
    New search for: Courant, J. L.
    New search for: Dreysee, H.
    New search for: Kawazoe, Y.
    New search for: Wille, L. T.
    New search for: Demangeat, C.

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    A Monte Carlo simulation of silicon nitride thin film microstructure in ultraviolet localized-chemical vapor deposition

    New search for: Flicstein, J.
    New search for: Pata, S.
    New search for: Le Solliec, J. M.
    New search for: Chun, L. S. H. K.
    New search for: Palmier, J. F.
    New search for: Courant, J. L.
    New search for: Dreysee, H.
    New search for: Kawazoe, Y.
    New search for: Wille, L. T.
    New search for: Demangeat, C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    A Monte Carlo simulation of silicon nitride thin film microstructure in ultraviolet localized-chemical vapor deposition

    New search for: Flicstein, J.
    New search for: Pata, S.
    New search for: Le Solliec, J. M.
    New search for: Chun, L. S. H. K.
    New search for: Palmier, J. F.
    New search for: Courant, J. L.
    New search for: Dreysee, H.
    New search for: Kawazoe, Y.
    New search for: Wille, L. T.
    New search for: Demangeat, C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
    Title:

    A Monte Carlo simulation of silicon nitride thin film microstructure in ultraviolet localized-chemical vapor deposition

    Contributors:

    Flicstein, J. (author) / Pata, S. (author) / Le Solliec, J. M. (author) / Chun, L. S. H. K. (author) / Palmier, J. F. (author) / Courant, J. L. (author) / Dreysee, H. / Kawazoe, Y. / Wille, L. T. / Demangeat, C.

    Published in:

    Computational modeling of issues in materials science ; 116-126

    COMPUTATIONAL MATERIALS SCIENCE ; 10

    Publication date:

    1998-01-01

    Size:

    11 pages

    ISSN:

    0927-0256

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1 / 510

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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