Experimental and simulation study of the flash lamp annealing for boron ultra-shallow junction formation and its stability: Fid-Bau Portal

Experimental and simulation study of the flash lamp annealing for boron ultra-shallow junction formation and its stability

Mok, K. R. / Yeong, S. H. / Colombeau, B. / Benistant, F. / Poon, C. H. / Chan, L. / Srinivasan, M. P.

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Experimental and simulation study of the flash lamp annealing for boron ultra-shallow junction formation and its stability

Mok, K. R. / Yeong, S. H. / Colombeau, B. / Benistant, F. / Poon, C. H. / Chan, L. / Srinivasan, M. P.

Experimental and simulation study of the flash lamp annealing for boron ultra-shallow junction formation and its stability

Mok, K. R. / Yeong, S. H. / Colombeau, B. / Benistant, F. / Poon, C. H. / Chan, L. / Srinivasan, M. P.

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Check availability in my library

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Title:

Experimental and simulation study of the flash lamp annealing for boron ultra-shallow junction formation and its stability

Contributors:

Mok, K. R. (author) / Yeong, S. H. (author) / Colombeau, B. (author) / Benistant, F. (author) / Poon, C. H. (author) / Chan, L. (author) / Srinivasan, M. P. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 154-155 ; 14-19

Publication date:

2008-01-01

Size:

6 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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