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Damage and annealing recovery of boron-implanted ultra-shallow junction: The correlation between beam current and surface configuration
Damage and annealing recovery of boron-implanted ultra-shallow junction: The correlation between beam current and surface configuration
Damage and annealing recovery of boron-implanted ultra-shallow junction: The correlation between beam current and surface configuration
Chang, Feng-Ming (author) / Wu, Zong-Zhe (author) / Lin, Yen-Fu (author) / Kao, Li-Chi (author) / Wu, Cheng-Ta (author) / JangJian, Shiu-Ko (author) / Chen, Yuan-Nian (author) / Lo, Kuang Yao (author)
Applied surface science ; 433 ; 160-165
2018-01-01
6 pages
Article (Journal)
English
DDC:
620.44
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