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    Ultra-shallow junction formation by spike annealing in a lamp-based or hot-walled rapid thermal annealing system: effect of ramp-up rate

    New search for: Agarwal, A.
    New search for: Fiory, A. T.
    New search for: Gossmann, H.-J. L.
    New search for: Rafferty, C. S.
    New search for: Frisella, P.
    New search for: Slaoui, A.
    New search for: Singh, R. K.
    New search for: Theiler, T.
    New search for: Muller, J. C.

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    Ultra-shallow junction formation by spike annealing in a lamp-based or hot-walled rapid thermal annealing system: effect of ramp-up rate

    New search for: Agarwal, A.
    New search for: Fiory, A. T.
    New search for: Gossmann, H.-J. L.
    New search for: Rafferty, C. S.
    New search for: Frisella, P.
    New search for: Slaoui, A.
    New search for: Singh, R. K.
    New search for: Theiler, T.
    New search for: Muller, J. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Ultra-shallow junction formation by spike annealing in a lamp-based or hot-walled rapid thermal annealing system: effect of ramp-up rate

    New search for: Agarwal, A.
    New search for: Fiory, A. T.
    New search for: Gossmann, H.-J. L.
    New search for: Rafferty, C. S.
    New search for: Frisella, P.
    New search for: Slaoui, A.
    New search for: Singh, R. K.
    New search for: Theiler, T.
    New search for: Muller, J. C.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
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    Document information
    Title:

    Ultra-shallow junction formation by spike annealing in a lamp-based or hot-walled rapid thermal annealing system: effect of ramp-up rate

    Contributors:

    Agarwal, A. (author) / Fiory, A. T. (author) / Gossmann, H.-J. L. (author) / Rafferty, C. S. (author) / Frisella, P. (author) / Slaoui, A. / Singh, R. K. / Theiler, T. / Muller, J. C.

    Published in:

    Papers presented at the European Materials Research Society 1998 Meeting. Symposium I: Rapid Thermal Processing ; 237-242

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 1

    Publication date:

    1998-01-01

    Size:

    6 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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