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Crystalline Recovery after Activation Annealing of Al Implanted 4H-SiC

Hattori, R. / Watanabe, T. / Mitani, T. / Sumitani, H. / Oomori, T.

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Crystalline Recovery after Activation Annealing of Al Implanted 4H-SiC

Hattori, R. / Watanabe, T. / Mitani, T. / Sumitani, H. / Oomori, T.

Crystalline Recovery after Activation Annealing of Al Implanted 4H-SiC

Hattori, R. / Watanabe, T. / Mitani, T. / Sumitani, H. / Oomori, T.

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Check availability in my library

Order at Subito €

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Document information

Title:

Crystalline Recovery after Activation Annealing of Al Implanted 4H-SiC

Contributors:

Hattori, R. (author) / Watanabe, T. (author) / Mitani, T. (author) / Sumitani, H. (author) / Oomori, T. (author)

Published in:

MATERIALS SCIENCE FORUM ; 600/603 ; 585-590

Publication date:

2009-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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