Damage annealing and dopant activation in Al ion implanted -SiC

Canut, B. / Ramos, S. / Roger, J.-A. et al. | British Library Online Contents | 1997

Annealing and activation of silicon implanted in semi-insulating InP substrates

Dong, H. W. / Zhao, Y. W. / Li, J. M. | British Library Online Contents | 2003

Clustering of ultra-low-energy implanted boron in silicon during activation annealing

Schroer, E. / Privitera, V. / Priolo, F. et al. | British Library Online Contents | 2000

Investigation of Two-Stage Activation Annealing of Al-Implanted 4H-SiC Layers

Merrett, J. N. / Scofield, J. D. / Tsao, B. H. et al. | British Library Online Contents | 2004

Optical Properties of Nb^+ Ions Implanted Sapphire before and after Annealing

Wang, X. / Lei, J. / Wang, D. et al. | British Library Online Contents | 2005