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Investigation of Two-Stage Activation Annealing of Al-Implanted 4H-SiC Layers
Investigation of Two-Stage Activation Annealing of Al-Implanted 4H-SiC Layers
Investigation of Two-Stage Activation Annealing of Al-Implanted 4H-SiC Layers
Merrett, J. N. (author) / Scofield, J. D. (author) / Tsao, B. H. (author) / Mazzola, M. (author) / Seale, D. (author) / Draper, W. A. (author) / Sankin, I. (author) / Casady, J. B. (author) / Bondarenko, V. (author)
MATERIALS SCIENCE FORUM ; 457/460 ; 921-924
2004-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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