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Growth of Thick AlN Layers by High Temperature CVD (HTCVD)

Claudel, A. / Blanquet, E. / Chaussende, D. / Audier, M. / Pique, D. / Pons, M.

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Growth of Thick AlN Layers by High Temperature CVD (HTCVD)

Claudel, A. / Blanquet, E. / Chaussende, D. / Audier, M. / Pique, D. / Pons, M.

Growth of Thick AlN Layers by High Temperature CVD (HTCVD)

Claudel, A. / Blanquet, E. / Chaussende, D. / Audier, M. / Pique, D. / Pons, M.

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Document information

Title:

Growth of Thick AlN Layers by High Temperature CVD (HTCVD)

Contributors:

Claudel, A. (author) / Blanquet, E. (author) / Chaussende, D. (author) / Audier, M. (author) / Pique, D. (author) / Pons, M. (author)

Published in:

MATERIALS SCIENCE FORUM ; 600/603 ; 1269-1272

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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