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Growth of Thick AlN Layers by High Temperature CVD (HTCVD)
Growth of Thick AlN Layers by High Temperature CVD (HTCVD)
Growth of Thick AlN Layers by High Temperature CVD (HTCVD)
Claudel, A. (author) / Blanquet, E. (author) / Chaussende, D. (author) / Audier, M. (author) / Pique, D. (author) / Pons, M. (author)
MATERIALS SCIENCE FORUM ; 600/603 ; 1269-1272
2009-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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