In Situ Boron and Aluminum Doping and Their Memory Effects in 4H-SiC Homoepitaxial Layers Grown by Hot-Wall LPCVD: Fid-Bau Portal

In Situ Boron and Aluminum Doping and Their Memory Effects in 4H-SiC Homoepitaxial Layers Grown by Hot-Wall LPCVD

Sun, G.S. / Zhao, Y.M. / Wang, L. / Zhao, W.S. / Liu, X.F. / Ji, G. / Zeng, Y.P.

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In Situ Boron and Aluminum Doping and Their Memory Effects in 4H-SiC Homoepitaxial Layers Grown by Hot-Wall LPCVD

Sun, G.S. / Zhao, Y.M. / Wang, L. / Zhao, W.S. / Liu, X.F. / Ji, G. / Zeng, Y.P.

In Situ Boron and Aluminum Doping and Their Memory Effects in 4H-SiC Homoepitaxial Layers Grown by Hot-Wall LPCVD

Sun, G.S. / Zhao, Y.M. / Wang, L. / Zhao, W.S. / Liu, X.F. / Ji, G. / Zeng, Y.P.

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Title:

In Situ Boron and Aluminum Doping and Their Memory Effects in 4H-SiC Homoepitaxial Layers Grown by Hot-Wall LPCVD

Contributors:

Sun, G.S. (author) / Zhao, Y.M. (author) / Wang, L. (author) / Zhao, W.S. (author) / Liu, X.F. (author) / Ji, G. (author) / Zeng, Y.P. (author)

Published in:

MATERIALS SCIENCE FORUM ; 600/603 ; 147-150

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Soueidan, M. / Ferro, G. / Nsouli, B. et al. | British Library Online Contents | 2007

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Sun, G. S. / Luo, M. C. / Wang, L. et al. | British Library Online Contents | 2002

In situ B doping of SiGe(C) using BCl3 in ultraclean hot-wall LPCVD

Kunii, Y. / Inokuchi, Y. / Moriya, A. et al. | British Library Online Contents | 2004

Homoepitaxial Growth of 4H- and 6H-SiC in a Commercial Horizontal LPCVD Reactor

Wischmeyer, F. / Leidich, D. / Niemann, E. | British Library Online Contents | 1998

Surface morphology determination of LPCVD homoepitaxial diamond using scanning tunnelling and atomic force microscopy

Maguire, H. G. / Kamo, M. / Lang, H. P. et al. | British Library Online Contents | 1992