Turning of Basal Plane Dislocations during Epitaxial Growth on 4^o Off-Axis 4H-SiC: Fid-Bau Portal

Turning of Basal Plane Dislocations during Epitaxial Growth on 4^o Off-Axis 4H-SiC

Myers-Ward, R.L. / VanMil, B.L. / Stahlbush, R.E. / Katz, S.L. / McCrate, J.M. / Kitt, S.A. / Eddy, C.R. / Gaskill, D.K.

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Turning of Basal Plane Dislocations during Epitaxial Growth on 4^o Off-Axis 4H-SiC

Myers-Ward, R.L. / VanMil, B.L. / Stahlbush, R.E. / Katz, S.L. / McCrate, J.M. / Kitt, S.A. / Eddy, C.R. / Gaskill, D.K.

Turning of Basal Plane Dislocations during Epitaxial Growth on 4^o Off-Axis 4H-SiC

Myers-Ward, R.L. / VanMil, B.L. / Stahlbush, R.E. / Katz, S.L. / McCrate, J.M. / Kitt, S.A. / Eddy, C.R. / Gaskill, D.K.

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Document information

Title:

Turning of Basal Plane Dislocations during Epitaxial Growth on 4^o Off-Axis 4H-SiC

Contributors:

Myers-Ward, R.L. (author) / VanMil, B.L. (author) / Stahlbush, R.E. (author) / Katz, S.L. (author) / McCrate, J.M. (author) / Kitt, S.A. (author) / Eddy, C.R. (author) / Gaskill, D.K. (author)

Published in:

MATERIALS SCIENCE FORUM ; 615/617 ; 105-108

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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