Uniform design and regression analysis of LPCVD boron carbide from BCl3-CH4-H2 system: Fid-Bau Portal

Uniform design and regression analysis of LPCVD boron carbide from BCl3-CH4-H2 system

Liu, Y. / Zhang, L. / Cheng, L. / Zeng, Q. / Zhang, W. / Yang, W. / Feng, Z. / Li, S. / Zeng, B.

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Uniform design and regression analysis of LPCVD boron carbide from BCl3-CH4-H2 system

Liu, Y. / Zhang, L. / Cheng, L. / Zeng, Q. / Zhang, W. / Yang, W. / Feng, Z. / Li, S. / Zeng, B.

Uniform design and regression analysis of LPCVD boron carbide from BCl3-CH4-H2 system

Liu, Y. / Zhang, L. / Cheng, L. / Zeng, Q. / Zhang, W. / Yang, W. / Feng, Z. / Li, S. / Zeng, B.

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Title:

Uniform design and regression analysis of LPCVD boron carbide from BCl3-CH4-H2 system

Contributors:

Liu, Y. (author) / Zhang, L. (author) / Cheng, L. (author) / Zeng, Q. (author) / Zhang, W. (author) / Yang, W. (author) / Feng, Z. (author) / Li, S. (author) / Zeng, B. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 5729-5735

Publication date:

2009-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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