Turning of Basal Plane Dislocations during Epitaxial Growth on 4^o Off-Axis 4H-SiC: Fid-Bau Portal

Turning of Basal Plane Dislocations during Epitaxial Growth on 4^o Off-Axis 4H-SiC

Myers-Ward, R.L. / VanMil, B.L. / Stahlbush, R.E. / Katz, S.L. / McCrate, J.M. / Kitt, S.A. / Eddy, C.R. / Gaskill, D.K.

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Turning of Basal Plane Dislocations during Epitaxial Growth on 4^o Off-Axis 4H-SiC

Myers-Ward, R.L. / VanMil, B.L. / Stahlbush, R.E. / Katz, S.L. / McCrate, J.M. / Kitt, S.A. / Eddy, C.R. / Gaskill, D.K.

Turning of Basal Plane Dislocations during Epitaxial Growth on 4^o Off-Axis 4H-SiC

Myers-Ward, R.L. / VanMil, B.L. / Stahlbush, R.E. / Katz, S.L. / McCrate, J.M. / Kitt, S.A. / Eddy, C.R. / Gaskill, D.K.

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Titel:

Turning of Basal Plane Dislocations during Epitaxial Growth on 4^o Off-Axis 4H-SiC

Beteiligte:

Myers-Ward, R.L. (Autor:in) / VanMil, B.L. (Autor:in) / Stahlbush, R.E. (Autor:in) / Katz, S.L. (Autor:in) / McCrate, J.M. (Autor:in) / Kitt, S.A. (Autor:in) / Eddy, C.R. (Autor:in) / Gaskill, D.K. (Autor:in)

Erschienen in:

MATERIALS SCIENCE FORUM ; 615/617 ; 105-108

Erscheinungsdatum:

01.01.2009

Format / Umfang:

4 pages

ISSN:

0255-5476

Medientyp:

Aufsatz (Zeitschrift)

Format:

Sprache:

Englisch

Klassifikation:

DDC: 620.11

Stahlbush, R.E. / Van Mil, B.L. / Liu, K.X. et al. | British Library Online Contents | 2009

Study of the Evolution of Basal Plane Dislocations during Epitaxial Growth: Role of the Surface Kinetics

Camarda, M. / La Magna, A. / Canino, A. et al. | British Library Online Contents | 2010

Bending of Basal-Plane Dislocations in VPE Grown 4H-SiC Epitaxial Layers

Ha, S. / Mieszkowski, P. / Rowland, L. B. et al. | British Library Online Contents | 2002

Conversion of Basal Plane Dislocations to Threading Edge Dislocations in Growth of Epitaxial Layers on 4H-SiC Substrates with a Vicinal Off-Angle

Masumoto, K. / Ito, S. / Goto, H. et al. | British Library Online Contents | 2014

Why are Only Some Basal Plane Dislocations Converted to Threading Edge Dislocations during SiC Epitaxy?

Zhang, Z. H. / Shrivastava, A. / Sudarshan, T. S. | British Library Online Contents | 2006

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