Influence of Growth Rate and C/Si-Ratio on the Formation of Point and Extended Defects in 4H-SiC Homoepitaxial Layers Investigated by DLTS: Fid-Bau Portal

Influence of Growth Rate and C/Si-Ratio on the Formation of Point and Extended Defects in 4H-SiC Homoepitaxial Layers Investigated by DLTS

Zippelius, B. / Krieger, M. / Weber, H.B. / Pensl, G. / Kallinger, B. / Friedrich, J. / Thomas, B.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Influence of Growth Rate and C/Si-Ratio on the Formation of Point and Extended Defects in 4H-SiC Homoepitaxial Layers Investigated by DLTS

Zippelius, B. / Krieger, M. / Weber, H.B. / Pensl, G. / Kallinger, B. / Friedrich, J. / Thomas, B.

Influence of Growth Rate and C/Si-Ratio on the Formation of Point and Extended Defects in 4H-SiC Homoepitaxial Layers Investigated by DLTS

Zippelius, B. / Krieger, M. / Weber, H.B. / Pensl, G. / Kallinger, B. / Friedrich, J. / Thomas, B.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Influence of Growth Rate and C/Si-Ratio on the Formation of Point and Extended Defects in 4H-SiC Homoepitaxial Layers Investigated by DLTS

Contributors:

Zippelius, B. (author) / Krieger, M. (author) / Weber, H.B. (author) / Pensl, G. (author) / Kallinger, B. (author) / Friedrich, J. (author) / Thomas, B. (author)

Published in:

MATERIALS SCIENCE FORUM ; 615/617 ; 393-396

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Gelczuk, L. / Dabrowska-Szata, M. / Jozwiak, G. | British Library Online Contents | 2005

Structure and Origin of Carrot Defects on 4H-SiC Homoepitaxial Layers

Dong, L. / Sun, G.S. / Yu, J. et al. | British Library Online Contents | 2014

Midgap Levels in As-Grown 4H-SiC Epilayers Investigated by DLTS

Danno, K. / Kimoto, T. / Matsunami, H. | British Library Online Contents | 2005

Growth and Properties of SiC On-Axis Homoepitaxial Layers

Hassan, J. / Bergman, J.P. / Palisaitis, J. et al. | British Library Online Contents | 2010

DLTS analysis of nickel-hydrogen complex defects in silicon

Shiraishi, M. / Sachse, J.-U. / Lemke, H. et al. | British Library Online Contents | 1999