Post-Growth Process Effect on Hetero-Epitaxial 3C-SiC Wafer Bow and Residual Stress: Fid-Bau Portal

Post-Growth Process Effect on Hetero-Epitaxial 3C-SiC Wafer Bow and Residual Stress

Anzalone, R. / Camarda, M. / Auditore, A. / Piluso, N. / Severino, A. / La Magna, A. / D Arrigo, G. / La Via, F.

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Post-Growth Process Effect on Hetero-Epitaxial 3C-SiC Wafer Bow and Residual Stress

Anzalone, R. / Camarda, M. / Auditore, A. / Piluso, N. / Severino, A. / La Magna, A. / D Arrigo, G. / La Via, F.

Post-Growth Process Effect on Hetero-Epitaxial 3C-SiC Wafer Bow and Residual Stress

Anzalone, R. / Camarda, M. / Auditore, A. / Piluso, N. / Severino, A. / La Magna, A. / D Arrigo, G. / La Via, F.

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Document information

Title:

Post-Growth Process Effect on Hetero-Epitaxial 3C-SiC Wafer Bow and Residual Stress

Contributors:

Anzalone, R. (author) / Camarda, M. (author) / Auditore, A. (author) / Piluso, N. (author) / Severino, A. (author) / La Magna, A. (author) / D Arrigo, G. (author) / La Via, F. (author) / Lebedev, A.A. / Davydov, S.Y.

Published in:

Silicon Carbide and Related Materials 2012 Selected, peer reviewed papers from the 9th European Conference on Silicon Carbide and Related Materials (ECSCRM 2012), September 2-6, 2012, St. Petersburg, Russian Federation ; 301-305

MATERIALS SCIENCE FORUM ; 740/742

Publication date:

2013-01-01

Size:

5 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Anzalone, R. / Locke, C. / Severino, A. et al. | British Library Online Contents | 2009

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Piluso, N. / Camarda, M. / Anzalone, R. et al. | British Library Online Contents | 2011

Hetero-Epitaxial Growth of 3C-SiC on Carbonized Silicon Substrates

Shimizu, H. / Hisada, K. | British Library Online Contents | 2003

Determining the Complete Residual Stress Tensors in SOS Hetero-Epitaxial Thin Film Systems by the Technique of X-Ray Diffraction

Liu, M. / Zhang, L.C. / Brawley, A. et al. | British Library Online Contents | 2010

Stress Evaluation on Hetero-Epitaxial 3C-SiC Films on (100) Si Substrates

Anzalone, R. / Camarda, M. / Locke, C. et al. | British Library Online Contents | 2012