Epitaxial PZT films for MEMS printing applications: Fid-Bau Portal

Epitaxial PZT films for MEMS printing applications

Funakubo, H. / Dekkers, M. / Sambri, A. / Gariglio, S. / Shklyarevskiy, I. / Rijnders, G.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Epitaxial PZT films for MEMS printing applications

Funakubo, H. / Dekkers, M. / Sambri, A. / Gariglio, S. / Shklyarevskiy, I. / Rijnders, G.

Epitaxial PZT films for MEMS printing applications

Funakubo, H. / Dekkers, M. / Sambri, A. / Gariglio, S. / Shklyarevskiy, I. / Rijnders, G.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Epitaxial PZT films for MEMS printing applications

Contributors:

Funakubo, H. (author) / Dekkers, M. (author) / Sambri, A. (author) / Gariglio, S. (author) / Shklyarevskiy, I. (author) / Rijnders, G. (author)

Published in:

MRS BULLETIN- MATERIALS RESEARCH SOCIETY ; 37 ; 1030

Publication date:

2012-01-01

Size:

1030 pages

ISSN:

0883-7694

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Ramesh, R. / Sands, T. / Keramidas, V. G. et al. | British Library Online Contents | 1994

Mechanical deformation of PZT thin films for MEMS applications

Bahr, D. F. / Robach, J. S. / Wright, J. S. et al. | British Library Online Contents | 1999

Tilted Epitaxial Films

Dugdale, P. J. / Pond, R. C. / Beanland, R. | British Library Online Contents | 1993

Thermal Transport Properties of Various Thin Films for MEMS Applications

Choi, S. R. / Kim, D. S. / Choa, S. H. | British Library Online Contents | 2006

3C-SiC Films on Si for MEMS Applications: Mechanical Properties

Locke, C. / Kravchenko, G. / Waters, P. et al. | British Library Online Contents | 2009