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Room Temperature Silicon Wafer Bonding with Ultra-Thin Polymer Films

Kraeuter, G. / Schumacher, A. / Goesele, U. / Jaworek, T. / Wegner, G.

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Room Temperature Silicon Wafer Bonding with Ultra-Thin Polymer Films

Kraeuter, G. / Schumacher, A. / Goesele, U. / Jaworek, T. / Wegner, G.

Room Temperature Silicon Wafer Bonding with Ultra-Thin Polymer Films

Kraeuter, G. / Schumacher, A. / Goesele, U. / Jaworek, T. / Wegner, G.

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Document information

Title:

Room Temperature Silicon Wafer Bonding with Ultra-Thin Polymer Films

Contributors:

Kraeuter, G. (author) / Schumacher, A. (author) / Goesele, U. (author) / Jaworek, T. (author) / Wegner, G. (author)

Published in:

ADVANCED MATERIALS -DEERFIELD BEACH- ; 9 ; 417-420

Publication date:

1997-01-01

Size:

4 pages

ISSN:

0935-9648

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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