Black germanium produced by inductively coupled plasma etching

Schicho, S. / Jaouad, A. / Sellmer, C. et al. | British Library Online Contents | 2013

BCl3/Ne etching of III-V semiconductors in a planar inductively coupled plasma reactor

Lim, W. T. / Baek, I. K. / Lee, J. W. et al. | British Library Online Contents | 2004

Reactive ion etching of FePt using inductively coupled plasma

Kanazawa, T. / Ono, K. / Takenaka, M. et al. | British Library Online Contents | 2008

Comparison of planar inductively coupled plasma etching of GaAs in BCl3, BCl3/Ar, and BCl3/Ne

Lee, J. W. / Lim, Y. T. / Baek, I. K. et al. | British Library Online Contents | 2004

Optimization of inductively coupled plasma deep etching of GaN and etching damage analysis

Qiu, R. / Lu, H. / Chen, D. et al. | British Library Online Contents | 2011