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Ion-bombardment induced morphology change of device related SiGe multilayer heterostructures
Ion-bombardment induced morphology change of device related SiGe multilayer heterostructures
Ion-bombardment induced morphology change of device related SiGe multilayer heterostructures
Hofer, C. (author) / Teichert, C. (author) / Oehme, M. (author) / Werner, J. (author) / Lyutovich, K. (author) / Kasper, E. (author)
APPLIED SURFACE SCIENCE ; 256 ; 267-273
2009-01-01
7 pages
Article (Journal)
English
DDC:
621.35
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