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    Nanoscale electrical characterization of ultrathin high-k dielectric MOS stacks: A conducting AFM study

    New search for: Uppal, H.J.
    New search for: Bernardini, S.
    New search for: Efthymiou, E.
    New search for: Volkos, S.N.
    New search for: Dimoulas, A.
    New search for: Markevich, V.
    New search for: Hamilton, B.
    New search for: Peaker, A.R.

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    Nanoscale electrical characterization of ultrathin high-k dielectric MOS stacks: A conducting AFM study

    New search for: Uppal, H.J.
    New search for: Bernardini, S.
    New search for: Efthymiou, E.
    New search for: Volkos, S.N.
    New search for: Dimoulas, A.
    New search for: Markevich, V.
    New search for: Hamilton, B.
    New search for: Peaker, A.R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Nanoscale electrical characterization of ultrathin high-k dielectric MOS stacks: A conducting AFM study

    New search for: Uppal, H.J.
    New search for: Bernardini, S.
    New search for: Efthymiou, E.
    New search for: Volkos, S.N.
    New search for: Dimoulas, A.
    New search for: Markevich, V.
    New search for: Hamilton, B.
    New search for: Peaker, A.R.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Nanoscale electrical characterization of ultrathin high-k dielectric MOS stacks: A conducting AFM study

    Contributors:

    Uppal, H.J. (author) / Bernardini, S. (author) / Efthymiou, E. (author) / Volkos, S.N. (author) / Dimoulas, A. (author) / Markevich, V. (author) / Hamilton, B. (author) / Peaker, A.R. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 11 ; 250-253

    Publication date:

    2008-01-01

    Size:

    4 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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