Stabilization of a very high-k crystalline ZrO2 phase by post deposition annealing of atomic layer deposited ZrO2/La2O3 dielectrics on germanium: Fid-Bau Portal

Stabilization of a very high-k crystalline ZrO2 phase by post deposition annealing of atomic layer deposited ZrO2/La2O3 dielectrics on germanium

Abermann, S. / Henkel, C. / Bethge, O. / Pozzovivo, G. / Klang, P. / Bertagnolli, E.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Stabilization of a very high-k crystalline ZrO2 phase by post deposition annealing of atomic layer deposited ZrO2/La2O3 dielectrics on germanium

Abermann, S. / Henkel, C. / Bethge, O. / Pozzovivo, G. / Klang, P. / Bertagnolli, E.

Stabilization of a very high-k crystalline ZrO2 phase by post deposition annealing of atomic layer deposited ZrO2/La2O3 dielectrics on germanium

Abermann, S. / Henkel, C. / Bethge, O. / Pozzovivo, G. / Klang, P. / Bertagnolli, E.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Stabilization of a very high-k crystalline ZrO2 phase by post deposition annealing of atomic layer deposited ZrO2/La2O3 dielectrics on germanium

Contributors:

Abermann, S. (author) / Henkel, C. (author) / Bethge, O. (author) / Pozzovivo, G. (author) / Klang, P. (author) / Bertagnolli, E. (author)

Published in:

APPLIED SURFACE SCIENCE ; 256 ; 5031-5034

Publication date:

2010-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Thangadurai, P. / Bose, A. C. / Ramasamy, S. | British Library Online Contents | 2005

Thermally stable Ag@ZrO2 core-shell via atomic layer deposition

Chang, Ikwhang / Lee, Jinhwan / Lee, Yeageun et al. | British Library Online Contents | 2017

Sol-gel ZrO2 and ZrO2-Al2O3 nanocrystalline thin films on Si as high-k dielectrics

Vitanov, P. / Harizanova, A. / Ivanova, T. et al. | British Library Online Contents | 2009

Effects of post-oxidation annealing temperature on ZrO2 thin film deposited on 4H-SiC substrate

Kurniawan, T. / Wong, Y. H. / Cheong, K. Y. et al. | British Library Online Contents | 2011

Low temperature solution processed high-κ ZrO2 gate dielectrics for nanoelectonics

Kumar, Arvind / Mondal, Sandip / Rao, K.S.R. Koteswara | British Library Online Contents | 2016