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    Significant Improvement in Reliability of Thermal Oxide on 4H-SiC (0001) Face Using Ammonia Post-Oxidation Annealing

    New search for: Senzaki, J.
    New search for: Suzuki, T.
    New search for: Shimozato, A.
    New search for: Fukuda, K.
    New search for: Arai, K.
    New search for: Okumura, H.
    New search for: Bauer, A.J.
    New search for: Friedrichs, P.
    New search for: Krieger, M.
    New search for: Pensl, G.
    New search for: Rupp, R.
    New search for: Seyller, T.

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    Significant Improvement in Reliability of Thermal Oxide on 4H-SiC (0001) Face Using Ammonia Post-Oxidation Annealing

    New search for: Senzaki, J.
    New search for: Suzuki, T.
    New search for: Shimozato, A.
    New search for: Fukuda, K.
    New search for: Arai, K.
    New search for: Okumura, H.
    New search for: Bauer, A.J.
    New search for: Friedrichs, P.
    New search for: Krieger, M.
    New search for: Pensl, G.
    New search for: Rupp, R.
    New search for: Seyller, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Significant Improvement in Reliability of Thermal Oxide on 4H-SiC (0001) Face Using Ammonia Post-Oxidation Annealing

    New search for: Senzaki, J.
    New search for: Suzuki, T.
    New search for: Shimozato, A.
    New search for: Fukuda, K.
    New search for: Arai, K.
    New search for: Okumura, H.
    New search for: Bauer, A.J.
    New search for: Friedrichs, P.
    New search for: Krieger, M.
    New search for: Pensl, G.
    New search for: Rupp, R.
    New search for: Seyller, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Significant Improvement in Reliability of Thermal Oxide on 4H-SiC (0001) Face Using Ammonia Post-Oxidation Annealing

    Contributors:

    Senzaki, J. (author) / Suzuki, T. (author) / Shimozato, A. (author) / Fukuda, K. (author) / Arai, K. (author) / Okumura, H. (author) / Bauer, A.J. / Friedrichs, P. / Krieger, M. / Pensl, G.

    Published in:

    Silicon Carbide and Related Materials 2009 ; 685-688

    MATERIALS SCIENCE FORUM ; 645/648

    Publication date:

    2010-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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