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    Effect of Doping Concentration in Buried-Channel NMOSFETs on Electrical Properties of 4H-SiC CMOS Devices

    New search for: Okamoto, M.
    New search for: Iijima, M.
    New search for: Yatsuo, T.
    New search for: Fukuda, K.
    New search for: Okumura, H.
    New search for: Bauer, A.J.
    New search for: Friedrichs, P.
    New search for: Krieger, M.
    New search for: Pensl, G.
    New search for: Rupp, R.
    New search for: Seyller, T.

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    Effect of Doping Concentration in Buried-Channel NMOSFETs on Electrical Properties of 4H-SiC CMOS Devices

    New search for: Okamoto, M.
    New search for: Iijima, M.
    New search for: Yatsuo, T.
    New search for: Fukuda, K.
    New search for: Okumura, H.
    New search for: Bauer, A.J.
    New search for: Friedrichs, P.
    New search for: Krieger, M.
    New search for: Pensl, G.
    New search for: Rupp, R.
    New search for: Seyller, T.

    Access

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    Check availability in my library
    Order at Subito €

    Effect of Doping Concentration in Buried-Channel NMOSFETs on Electrical Properties of 4H-SiC CMOS Devices

    New search for: Okamoto, M.
    New search for: Iijima, M.
    New search for: Yatsuo, T.
    New search for: Fukuda, K.
    New search for: Okumura, H.
    New search for: Bauer, A.J.
    New search for: Friedrichs, P.
    New search for: Krieger, M.
    New search for: Pensl, G.
    New search for: Rupp, R.
    New search for: Seyller, T.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
    Title:

    Effect of Doping Concentration in Buried-Channel NMOSFETs on Electrical Properties of 4H-SiC CMOS Devices

    Contributors:

    Okamoto, M. (author) / Iijima, M. (author) / Yatsuo, T. (author) / Fukuda, K. (author) / Okumura, H. (author) / Bauer, A.J. / Friedrichs, P. / Krieger, M. / Pensl, G. / Rupp, R.

    Published in:

    Silicon Carbide and Related Materials 2009 ; 995-998

    MATERIALS SCIENCE FORUM ; 645/648

    Publication date:

    2010-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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