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Characteristics of Diamond SBD's Fabricated on Half Inch Size CVD Wafer Made by the ``Direct Wafer Fabrication Technique''
Characteristics of Diamond SBD's Fabricated on Half Inch Size CVD Wafer Made by the ``Direct Wafer Fabrication Technique''
Characteristics of Diamond SBD's Fabricated on Half Inch Size CVD Wafer Made by the ``Direct Wafer Fabrication Technique''
Shikata, S. (author) / Umezawa, H. (author) / Yamada, H. (author) / Tsubouchi, T. (author) / Mokuno, Y. (author) / Chayahara, A. (author) / Bauer, A.J. / Friedrichs, P. / Krieger, M. / Pensl, G.
Silicon Carbide and Related Materials 2009 ; 1227-1230
MATERIALS SCIENCE FORUM ; 645/648
2010-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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