Surface Polishing of 2-Inch 4H-SiC Wafer Using Fe Abrasive Particles

Kubota, A. / Ichimori, Y. / Touge, M. | British Library Online Contents | 2012

Planar Defects

Williams, David B. / Carter, C. Barry | Springer Verlag | 1996

Characteristics of Diamond SBD's Fabricated on Half Inch Size CVD Wafer Made by the ``Direct Wafer Fabrication Technique''

Shikata, S. / Umezawa, H. / Yamada, H. et al. | British Library Online Contents | 2010

Diagnosis and Reduction of Robot Arm Vibration for 12-Inch Wafer Spin Scrubber

Kim, N. / Hong, M. | British Library Online Contents | 2004

Production of 8-Inch SiC Wafer by Hybridization of Single and Polycrystalline SiC Wafers

Murata, K. / Fujioka, N. / Chinone, Y. et al. | British Library Online Contents | 2003