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Thermal stability of SiGe films on an ultra thin Ge buffer layer on Si grown at low temperature

Chen, C. / Zhou, Z. / Chen, Y. / Li, C. / Lai, H. / Chen, S.

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Thermal stability of SiGe films on an ultra thin Ge buffer layer on Si grown at low temperature

Chen, C. / Zhou, Z. / Chen, Y. / Li, C. / Lai, H. / Chen, S.

Thermal stability of SiGe films on an ultra thin Ge buffer layer on Si grown at low temperature

Chen, C. / Zhou, Z. / Chen, Y. / Li, C. / Lai, H. / Chen, S.

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Order at Subito €

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Document information

Title:

Thermal stability of SiGe films on an ultra thin Ge buffer layer on Si grown at low temperature

Contributors:

Chen, C. (author) / Zhou, Z. (author) / Chen, Y. (author) / Li, C. (author) / Lai, H. (author) / Chen, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 256 ; 6936-6940

Publication date:

2010-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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