High-Speed Spatial Atomic-Layer Deposition of Aluminum Oxide Layers for Solar Cell Passivation: Fid-Bau Portal

High-Speed Spatial Atomic-Layer Deposition of Aluminum Oxide Layers for Solar Cell Passivation

Poodt, P. / Lankhorst, A. / Roozeboom, F. / Spee, K. / Maas, D. / Vermeer, A.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

High-Speed Spatial Atomic-Layer Deposition of Aluminum Oxide Layers for Solar Cell Passivation

Poodt, P. / Lankhorst, A. / Roozeboom, F. / Spee, K. / Maas, D. / Vermeer, A.

High-Speed Spatial Atomic-Layer Deposition of Aluminum Oxide Layers for Solar Cell Passivation

Poodt, P. / Lankhorst, A. / Roozeboom, F. / Spee, K. / Maas, D. / Vermeer, A.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

High-Speed Spatial Atomic-Layer Deposition of Aluminum Oxide Layers for Solar Cell Passivation

Contributors:

Poodt, P. (author) / Lankhorst, A. (author) / Roozeboom, F. (author) / Spee, K. (author) / Maas, D. (author) / Vermeer, A. (author)

Published in:

ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 22 ; 3564-3567

Publication date:

2010-01-01

Size:

4 pages

ISSN:

0935-9648

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

PRINZ FRIEDRICH B / XU SHICHENG / ENGLISH TIMOTHY et al. | European Patent Office | 2020

Free access

ATOMIC LAYER DEPOSITION WITH PASSIVATION TREATMENT

PRINZ FRIEDRICH B / XU SHICHENG / ENGLISH TIMOTHY et al. | European Patent Office | 2018

Free access

GaAs surface passivation by plasma-enhanced atomic-layer-deposited aluminum nitride

Bosund, M. / Mattila, P. / Aierken, A. et al. | British Library Online Contents | 2010

Silicon surface passivation using thin HfO2 films by atomic layer deposition

Gope, J. / Batra, N. / Panigrahi, J. et al. | British Library Online Contents | 2015

Combinatorial Synthesis Study of Passivation Layers for Solar Cell Applications

Ikeno, N. / Tachibana, T. / Lee, H. et al. | British Library Online Contents | 2012