A platform for research: civil engineering, architecture and urbanism
Photoresist-free lithography of 3 m wide UO~3 lines from amorphous films of uranyl complexes
Photoresist-free lithography of 3 m wide UO~3 lines from amorphous films of uranyl complexes
Photoresist-free lithography of 3 m wide UO~3 lines from amorphous films of uranyl complexes
Goetting, L. B. (author) / Palmer, B. J. (author) / Gao, M. (author) / Hill, R. H. (author)
JOURNAL OF MATERIALS SCIENCE ; 29 ; 6147
1994-01-01
6147 pages
Article (Journal)
Unknown
DDC:
620.11
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
British Library Online Contents | 1998
|Photoresist Templates for Wafer Scale Defect Free Evaporative Lithography
British Library Online Contents | 2010
|British Library Online Contents | 1998
|Influences of water on photoresist surface in immersion lithography technology
British Library Online Contents | 2008
|Fabrication of suspended micro-structures using diffsuser lithography on negative photoresist
British Library Online Contents | 2008
|