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    Microstructure and Electric Transport Characteristic of Microcrystalline Silicon Films Fabricated by Very High Frequency Plasma Enhanced Chemical Vapor Deposition

    New search for: Wang, X.
    New search for: Huang, R.
    New search for: Song, J.
    New search for: Guo, Y.Q.
    New search for: Song, C.
    New search for: Zhang, Y.X.
    New search for: Huang, Y.M.

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    Microstructure and Electric Transport Characteristic of Microcrystalline Silicon Films Fabricated by Very High Frequency Plasma Enhanced Chemical Vapor Deposition

    New search for: Wang, X.
    New search for: Huang, R.
    New search for: Song, J.
    New search for: Guo, Y.Q.
    New search for: Song, C.
    New search for: Zhang, Y.X.
    New search for: Huang, Y.M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Microstructure and Electric Transport Characteristic of Microcrystalline Silicon Films Fabricated by Very High Frequency Plasma Enhanced Chemical Vapor Deposition

    New search for: Wang, X.
    New search for: Huang, R.
    New search for: Song, J.
    New search for: Guo, Y.Q.
    New search for: Song, C.
    New search for: Zhang, Y.X.
    New search for: Huang, Y.M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
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    Document information
    Title:

    Microstructure and Electric Transport Characteristic of Microcrystalline Silicon Films Fabricated by Very High Frequency Plasma Enhanced Chemical Vapor Deposition

    Contributors:

    Wang, X. (author) / Huang, R. (author) / Song, J. (author) / Guo, Y.Q. (author) / Song, C. (author) / Zhang, Y.X. (author) / Huang, Y.M.

    Published in:

    Optoelectronic Materials ; 600-603

    MATERIALS SCIENCE FORUM ; 663/665

    Publication date:

    2011-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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