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    Static dissolution rate of tungsten film versus chemical adjustments of a reused slurry for chemical mechanical polishing

    New search for: Coetsier, C. M.
    New search for: Testa, F.
    New search for: Carretier, E.
    New search for: Ennahali, M.
    New search for: Laborie, B.
    New search for: Mouton-arnaud, C.
    New search for: Fluchere, O.
    New search for: Moulin, P.

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    Static dissolution rate of tungsten film versus chemical adjustments of a reused slurry for chemical mechanical polishing

    New search for: Coetsier, C. M.
    New search for: Testa, F.
    New search for: Carretier, E.
    New search for: Ennahali, M.
    New search for: Laborie, B.
    New search for: Mouton-arnaud, C.
    New search for: Fluchere, O.
    New search for: Moulin, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Static dissolution rate of tungsten film versus chemical adjustments of a reused slurry for chemical mechanical polishing

    New search for: Coetsier, C. M.
    New search for: Testa, F.
    New search for: Carretier, E.
    New search for: Ennahali, M.
    New search for: Laborie, B.
    New search for: Mouton-arnaud, C.
    New search for: Fluchere, O.
    New search for: Moulin, P.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Static dissolution rate of tungsten film versus chemical adjustments of a reused slurry for chemical mechanical polishing

    Contributors:

    Coetsier, C. M. (author) / Testa, F. (author) / Carretier, E. (author) / Ennahali, M. (author) / Laborie, B. (author) / Mouton-arnaud, C. (author) / Fluchere, O. (author) / Moulin, P. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 257 ; 6163-6170

    Publication date:

    2011-01-01

    Size:

    8 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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