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    Application of tungsten slurry for copper-chemical mechanical polishing

    New search for: Seo, Y. J.
    New search for: Lee, W. S.

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    Application of tungsten slurry for copper-chemical mechanical polishing

    New search for: Seo, Y. J.
    New search for: Lee, W. S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Application of tungsten slurry for copper-chemical mechanical polishing

    New search for: Seo, Y. J.
    New search for: Lee, W. S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Application of tungsten slurry for copper-chemical mechanical polishing

    Contributors:

    Seo, Y. J. (author) / Lee, W. S. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 118 ; 285-288

    Publication date:

    2005-01-01

    Size:

    4 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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