Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    High Growth Rate with Reduced Surface Roughness during On-Axis Homeopitaxial Growth of 4H-SiC

    New search for: Hassan, J.
    New search for: Bergman, J.P.
    New search for: Henry, A.
    New search for: Janzen, E.
    New search for: Monakhov, E.V.
    New search for: Hornos, T.
    New search for: Svensson, B.G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    High Growth Rate with Reduced Surface Roughness during On-Axis Homeopitaxial Growth of 4H-SiC

    New search for: Hassan, J.
    New search for: Bergman, J.P.
    New search for: Henry, A.
    New search for: Janzen, E.
    New search for: Monakhov, E.V.
    New search for: Hornos, T.
    New search for: Svensson, B.G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    High Growth Rate with Reduced Surface Roughness during On-Axis Homeopitaxial Growth of 4H-SiC

    New search for: Hassan, J.
    New search for: Bergman, J.P.
    New search for: Henry, A.
    New search for: Janzen, E.
    New search for: Monakhov, E.V.
    New search for: Hornos, T.
    New search for: Svensson, B.G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    High Growth Rate with Reduced Surface Roughness during On-Axis Homeopitaxial Growth of 4H-SiC

    Contributors:

    Hassan, J. (author) / Bergman, J.P. (author) / Henry, A. (author) / Janzen, E. (author) / Monakhov, E.V. / Hornos, T. / Svensson, B.G.

    Published in:

    Silicon Carbide and Related Materials 2010 ; 115-118

    MATERIALS SCIENCE FORUM ; 679/680

    Publication date:

    2011-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    4H-SiC Epitaxial Growth on Carbon-Face Substrates with Reduced Surface Roughness

    Aigo, T. / Sawamura, M. / Fujimoto, T. et al. | British Library Online Contents | 2006

    High Uniformity with Reduced Surface Roughness of Chloride Based CVD Process on 100mm 4^o Off-Axis 4H-SiC

    Das, H. / Sunkari, S. / Oldham, T. et al. | British Library Online Contents | 2012

    Growth of 4H-SiC epilayers with low surface roughness and morphological defects density on 4^o off-axis substrates

    Dong, L. / Sun, G. / Yu, J. et al. | British Library Online Contents | 2013

    Fatigue crack growth with overloads/underloads: Interaction effects and surface roughness

    Romeiro, F. / de Freitas, M. / da Fonte, M. | British Library Online Contents | 2009

    The effect of substrate surface roughness on ZnO nanostructures growth

    Roozbehi, M. / Sangpour, P. / Khademi, A. et al. | British Library Online Contents | 2011

    Back to top