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    Advanced Stress Analysis by Micro-Structures Realization on High Quality Hetero-Epitaxial 3C-SiC for MEMS Application

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    Advanced Stress Analysis by Micro-Structures Realization on High Quality Hetero-Epitaxial 3C-SiC for MEMS Application

    New search for: Anzalone, R.
    New search for: Camarda, M.
    New search for: D Arrigo, G.
    New search for: Locke, C.
    New search for: Canino, A.
    New search for: Piluso, N.
    New search for: Severino, A.
    New search for: La Magna, A.
    New search for: Saddow, S.E.
    New search for: La Via, F.
    New search for: Monakhov, E.V.
    New search for: Hornos, T.
    New search for: Svensson, B.G.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Advanced Stress Analysis by Micro-Structures Realization on High Quality Hetero-Epitaxial 3C-SiC for MEMS Application

    New search for: Anzalone, R.
    New search for: Camarda, M.
    New search for: D Arrigo, G.
    New search for: Locke, C.
    New search for: Canino, A.
    New search for: Piluso, N.
    New search for: Severino, A.
    New search for: La Magna, A.
    New search for: Saddow, S.E.
    New search for: La Via, F.
    New search for: Monakhov, E.V.
    New search for: Hornos, T.
    New search for: Svensson, B.G.

    Access

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    Document information
    Title:

    Advanced Stress Analysis by Micro-Structures Realization on High Quality Hetero-Epitaxial 3C-SiC for MEMS Application

    Contributors:

    Anzalone, R. (author) / Camarda, M. (author) / D Arrigo, G. (author) / Locke, C. (author) / Canino, A. (author) / Piluso, N. (author) / Severino, A. (author) / La Magna, A. (author) / Saddow, S.E. (author) / La Via, F. (author)

    Published in:

    Silicon Carbide and Related Materials 2010 ; 133-136

    MATERIALS SCIENCE FORUM ; 679/680

    Publication date:

    2011-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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