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Microscopic Structure of Directly Bonded Silicon Substrates

Kato, T. / Ohara, Y. / Ueda, T. / Kikkawa, J. / Nakamura, Y. / Sakai, A. / Nakatsuka, O. / Ogawa, M. / Zaima, S. / Toyoda, E.

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Microscopic Structure of Directly Bonded Silicon Substrates

Kato, T. / Ohara, Y. / Ueda, T. / Kikkawa, J. / Nakamura, Y. / Sakai, A. / Nakatsuka, O. / Ogawa, M. / Zaima, S. / Toyoda, E.

Microscopic Structure of Directly Bonded Silicon Substrates

Kato, T. / Ohara, Y. / Ueda, T. / Kikkawa, J. / Nakamura, Y. / Sakai, A. / Nakatsuka, O. / Ogawa, M. / Zaima, S. / Toyoda, E.

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Document information

Title:

Microscopic Structure of Directly Bonded Silicon Substrates

Contributors:

Kato, T. (author) / Ohara, Y. (author) / Ueda, T. (author) / Kikkawa, J. (author) / Nakamura, Y. (author) / Sakai, A. (author) / Nakatsuka, O. (author) / Ogawa, M. (author) / Zaima, S. (author) / Toyoda, E. (author)

Published in:

Technology Evolution for Silicon Nano-Electronics ; 164-170

KEY ENGINEERING MATERIALS ; 470

Publication date:

2011-01-01

Size:

7 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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