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Numerical Simulation of 300mm CZ Silicon Crystal Growth with Axial Magnetic Fields

Xu, W.T. / Tu, H.L. / Chang, Q. / Xiao, Q.H. / Dai, X.L. / Liu, Y.X. / Li, Z.F. / Chang, L. / Liu, W.D.

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Numerical Simulation of 300mm CZ Silicon Crystal Growth with Axial Magnetic Fields

Xu, W.T. / Tu, H.L. / Chang, Q. / Xiao, Q.H. / Dai, X.L. / Liu, Y.X. / Li, Z.F. / Chang, L. / Liu, W.D.

Numerical Simulation of 300mm CZ Silicon Crystal Growth with Axial Magnetic Fields

Xu, W.T. / Tu, H.L. / Chang, Q. / Xiao, Q.H. / Dai, X.L. / Liu, Y.X. / Li, Z.F. / Chang, L. / Liu, W.D.

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Document information

Title:

Numerical Simulation of 300mm CZ Silicon Crystal Growth with Axial Magnetic Fields

Contributors:

Xu, W.T. (author) / Tu, H.L. (author) / Chang, Q. (author) / Xiao, Q.H. (author) / Dai, X.L. (author) / Liu, Y.X. (author) / Li, Z.F. (author) / Chang, L. (author) / Liu, W.D. (author) / Han, E.

Published in:

Materials Modeling, Simulation, and Characterization ; 179-183

MATERIALS SCIENCE FORUM ; 689

Publication date:

2011-01-01

Size:

5 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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