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Influence of Pore-Forming Agent on the Performance of Resin Bond Diamond Grinding Wheel in Back-Grinding Silicon Wafers
Influence of Pore-Forming Agent on the Performance of Resin Bond Diamond Grinding Wheel in Back-Grinding Silicon Wafers
Influence of Pore-Forming Agent on the Performance of Resin Bond Diamond Grinding Wheel in Back-Grinding Silicon Wafers
Li, K.H. (author) / Guo, Q. (author) / Liu, M.Y. (author) / Zhao, Y.J. (author) / Shi, D.L. (author)
KEY ENGINEERING MATERIALS ; 487 ; 169-174
2011-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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