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Study on Lubricating Behavior in Chemical Mechanical Polishing

Su, J.X. / Du, J.X. / Liu, X.L. / Liu, H.N. / Kang, R.K.

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Study on Lubricating Behavior in Chemical Mechanical Polishing

Su, J.X. / Du, J.X. / Liu, X.L. / Liu, H.N. / Kang, R.K.

Study on Lubricating Behavior in Chemical Mechanical Polishing

Su, J.X. / Du, J.X. / Liu, X.L. / Liu, H.N. / Kang, R.K.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Study on Lubricating Behavior in Chemical Mechanical Polishing

Contributors:

Su, J.X. (author) / Du, J.X. (author) / Liu, X.L. (author) / Liu, H.N. (author) / Kang, R.K. (author)

Published in:

KEY ENGINEERING MATERIALS ; 487 ; 243-247

Publication date:

2011-01-01

Size:

5 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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