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Thermally induced damages of PECVD SiN~x thin films

Liu, Y. / Jehanathan, N. / Dell, J.

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Thermally induced damages of PECVD SiN~x thin films

Liu, Y. / Jehanathan, N. / Dell, J.

Thermally induced damages of PECVD SiN~x thin films

Liu, Y. / Jehanathan, N. / Dell, J.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Thermally induced damages of PECVD SiN~x thin films

Contributors:

Liu, Y. (author) / Jehanathan, N. (author) / Dell, J. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 26 ; 2552-2557

Publication date:

2011-01-01

Size:

6 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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