A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Effect of Trench Aspect Ratio on Microstructure and Texture in Damascene Cu Interconnects
Effect of Trench Aspect Ratio on Microstructure and Texture in Damascene Cu Interconnects
Effect of Trench Aspect Ratio on Microstructure and Texture in Damascene Cu Interconnects
Chen, L. (author) / Yuan, G.J. (author) / Xu, J.G. (author) / Guo, F. (author) / Pang, N. (author) / Chandra, T. / Ionescu, M. / Mantovani, D.
2012-01-01
6 pages
Article (Journal)
English
DDC:
620.11
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Texture Investigations In Damascene Copper Interconnects
| British Library Online Contents | 2002
Texture Investigation in Cu Damascene Interconnects during Annealing
| British Library Online Contents | 2005
Formation of Slit-Like Voids at Trench Corners of Damascene Cu Interconnects
| British Library Online Contents | 2002
Self-Annealing Textures of Copper Damascene Interconnects
| British Library Online Contents | 2004
Texture, Microstructure and Stress Investigations in 0.18 mum Damascene Cu Interconnect Lines
| British Library Online Contents | 2003