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    The Influence of Gate Material, SiO~2 Fabrication Method and Gate Edge Effect on Interface Trap Density in 3C-SiC MOS Capacitors

    New search for: Gutt, T.
    New search for: Malachowski, T.
    New search for: Przewlocki, H.M.
    New search for: Engstrom, O.
    New search for: Bakowski, M.
    New search for: Esteve, R.
    New search for: Alquier, D.

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    The Influence of Gate Material, SiO~2 Fabrication Method and Gate Edge Effect on Interface Trap Density in 3C-SiC MOS Capacitors

    New search for: Gutt, T.
    New search for: Malachowski, T.
    New search for: Przewlocki, H.M.
    New search for: Engstrom, O.
    New search for: Bakowski, M.
    New search for: Esteve, R.
    New search for: Alquier, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    The Influence of Gate Material, SiO~2 Fabrication Method and Gate Edge Effect on Interface Trap Density in 3C-SiC MOS Capacitors

    New search for: Gutt, T.
    New search for: Malachowski, T.
    New search for: Przewlocki, H.M.
    New search for: Engstrom, O.
    New search for: Bakowski, M.
    New search for: Esteve, R.
    New search for: Alquier, D.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
    Similar titles

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    Document information
    Title:

    The Influence of Gate Material, SiO~2 Fabrication Method and Gate Edge Effect on Interface Trap Density in 3C-SiC MOS Capacitors

    Contributors:

    Gutt, T. (author) / Malachowski, T. (author) / Przewlocki, H.M. (author) / Engstrom, O. (author) / Bakowski, M. (author) / Esteve, R. (author) / Alquier, D.

    Published in:

    HeteroSiC & WASMPE 2011 ; 109-113

    MATERIALS SCIENCE FORUM ; 711

    Publication date:

    2012-01-01

    Size:

    5 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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