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    Study of Defects Generated by Standard- and Plasma-Implantation of Nitrogen Atoms in 4H-SiC Epitaxial Layers

    New search for: Ottaviani, L.
    New search for: Kazan, M.
    New search for: Biondo, S.
    New search for: Tuomisto, F.
    New search for: Milesi, F.
    New search for: Duchaine, J.
    New search for: Torregrosa, F.
    New search for: Palais, O.
    New search for: Yamada-Kaneta, H.
    New search for: Sakai, A.

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    Study of Defects Generated by Standard- and Plasma-Implantation of Nitrogen Atoms in 4H-SiC Epitaxial Layers

    New search for: Ottaviani, L.
    New search for: Kazan, M.
    New search for: Biondo, S.
    New search for: Tuomisto, F.
    New search for: Milesi, F.
    New search for: Duchaine, J.
    New search for: Torregrosa, F.
    New search for: Palais, O.
    New search for: Yamada-Kaneta, H.
    New search for: Sakai, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Study of Defects Generated by Standard- and Plasma-Implantation of Nitrogen Atoms in 4H-SiC Epitaxial Layers

    New search for: Ottaviani, L.
    New search for: Kazan, M.
    New search for: Biondo, S.
    New search for: Tuomisto, F.
    New search for: Milesi, F.
    New search for: Duchaine, J.
    New search for: Torregrosa, F.
    New search for: Palais, O.
    New search for: Yamada-Kaneta, H.
    New search for: Sakai, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
    Title:

    Study of Defects Generated by Standard- and Plasma-Implantation of Nitrogen Atoms in 4H-SiC Epitaxial Layers

    Contributors:

    Ottaviani, L. (author) / Kazan, M. (author) / Biondo, S. (author) / Tuomisto, F. (author) / Milesi, F. (author) / Duchaine, J. (author) / Torregrosa, F. (author) / Palais, O. (author) / Yamada-Kaneta, H. / Sakai, A.

    Published in:

    Defects-Recognition, Imaging and Physics in Semiconductors XIV ; 41-44

    MATERIALS SCIENCE FORUM ; 725

    Publication date:

    2012-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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