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Effect of the post-deposition annealing on electrical characteristics of MIS structures with HfO2/SiO2 gate dielectric stacks
Effect of the post-deposition annealing on electrical characteristics of MIS structures with HfO2/SiO2 gate dielectric stacks
Effect of the post-deposition annealing on electrical characteristics of MIS structures with HfO2/SiO2 gate dielectric stacks
Taube, A. (author) / Mroczynski, R. (author) / Korwin-Mikke, K. (author) / Gieraltowska, S. (author) / Szmidt, J. (author) / Piotrowska, A. (author)
2012-01-01
5 pages
Article (Journal)
English
DDC:
620.11
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