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    Acoustic spectroscopy and electrical characterization of Si/NAOS-SiO2/HfO2 structures

    New search for: Bury, P.
    New search for: Matsumoto, T.
    New search for: Bellan, I.
    New search for: Janek, M.
    New search for: Kobayashi, H.

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    Acoustic spectroscopy and electrical characterization of Si/NAOS-SiO2/HfO2 structures

    New search for: Bury, P.
    New search for: Matsumoto, T.
    New search for: Bellan, I.
    New search for: Janek, M.
    New search for: Kobayashi, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Acoustic spectroscopy and electrical characterization of Si/NAOS-SiO2/HfO2 structures

    New search for: Bury, P.
    New search for: Matsumoto, T.
    New search for: Bellan, I.
    New search for: Janek, M.
    New search for: Kobayashi, H.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Acoustic spectroscopy and electrical characterization of Si/NAOS-SiO2/HfO2 structures

    Contributors:

    Bury, P. (author) / Matsumoto, T. (author) / Bellan, I. (author) / Janek, M. (author) / Kobayashi, H. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 269 ; 50-54

    Publication date:

    2013-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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