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Inductively coupled plasma etching to fabricate sensing window for polymer waveguide biosensor application

Wang, X. / Meng, J. / Sun, X. / Yang, T. / Sun, J. / Chen, C. / Zheng, C. / Zhang, D.

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Inductively coupled plasma etching to fabricate sensing window for polymer waveguide biosensor application

Wang, X. / Meng, J. / Sun, X. / Yang, T. / Sun, J. / Chen, C. / Zheng, C. / Zhang, D.

Inductively coupled plasma etching to fabricate sensing window for polymer waveguide biosensor application

Wang, X. / Meng, J. / Sun, X. / Yang, T. / Sun, J. / Chen, C. / Zheng, C. / Zhang, D.

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Document information

Title:

Inductively coupled plasma etching to fabricate sensing window for polymer waveguide biosensor application

Contributors:

Wang, X. (author) / Meng, J. (author) / Sun, X. (author) / Yang, T. (author) / Sun, J. (author) / Chen, C. (author) / Zheng, C. (author) / Zhang, D. (author)

Published in:

APPLIED SURFACE SCIENCE ; 259 ; 105-109

Publication date:

2012-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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