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    Influence of the sputtering reactive gas on the oxide and oxynitride La?Ti?O?N deposition by RF magnetron sputtering

    New search for: Lu, Y.
    New search for: Le Paven-Thivet, C.
    New search for: Benzerga, R.
    New search for: Le Gendre, L.
    New search for: Sharaiha, A.
    New search for: Tessier, F.
    New search for: Chevire, F.

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    Influence of the sputtering reactive gas on the oxide and oxynitride La?Ti?O?N deposition by RF magnetron sputtering

    New search for: Lu, Y.
    New search for: Le Paven-Thivet, C.
    New search for: Benzerga, R.
    New search for: Le Gendre, L.
    New search for: Sharaiha, A.
    New search for: Tessier, F.
    New search for: Chevire, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Influence of the sputtering reactive gas on the oxide and oxynitride La?Ti?O?N deposition by RF magnetron sputtering

    New search for: Lu, Y.
    New search for: Le Paven-Thivet, C.
    New search for: Benzerga, R.
    New search for: Le Gendre, L.
    New search for: Sharaiha, A.
    New search for: Tessier, F.
    New search for: Chevire, F.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Influence of the sputtering reactive gas on the oxide and oxynitride La?Ti?O?N deposition by RF magnetron sputtering

    Contributors:

    Lu, Y. (author) / Le Paven-Thivet, C. (author) / Benzerga, R. (author) / Le Gendre, L. (author) / Sharaiha, A. (author) / Tessier, F. (author) / Chevire, F. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 264 ; 533-537

    Publication date:

    2013-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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