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Surface Preparation of 4^o Off-Axis 4H-SiC Substrate for Epitaxial Growth
Surface Preparation of 4^o Off-Axis 4H-SiC Substrate for Epitaxial Growth
Surface Preparation of 4^o Off-Axis 4H-SiC Substrate for Epitaxial Growth
Li, X. (author) / Hassan, J.U. (author) / Kordina, O. (author) / Janzen, E. (author) / Henry, A. (author) / Lebedev, A.A. / Davydov, S.Y. / Ivanov, P.A. / Levinshtein, M.E.
2013-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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