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Defect Generation and Annihilation in 3C-SiC-(001) Homoepitaxial Growth by Sublimation
Defect Generation and Annihilation in 3C-SiC-(001) Homoepitaxial Growth by Sublimation
Defect Generation and Annihilation in 3C-SiC-(001) Homoepitaxial Growth by Sublimation
Hens, P. (author) / Muller, J. (author) / Wagner, G. (author) / Liljedahl, R. (author) / Spiecker, E. (author) / Syvajarvi, M. (author) / Lebedev, A.A. / Davydov, S.Y. / Ivanov, P.A. / Levinshtein, M.E.
2013-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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