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    Nanomechanical studies and materials characterization of metal/polymer bilayer MEMS cantilevers

    New search for: Pustan, M.
    New search for: Dudescu, C.
    New search for: Birleanu, C.
    New search for: Rymuza, Z.

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    Nanomechanical studies and materials characterization of metal/polymer bilayer MEMS cantilevers

    New search for: Pustan, M.
    New search for: Dudescu, C.
    New search for: Birleanu, C.
    New search for: Rymuza, Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Nanomechanical studies and materials characterization of metal/polymer bilayer MEMS cantilevers

    New search for: Pustan, M.
    New search for: Dudescu, C.
    New search for: Birleanu, C.
    New search for: Rymuza, Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Nanomechanical studies and materials characterization of metal/polymer bilayer MEMS cantilevers

    Contributors:

    Pustan, M. (author) / Dudescu, C. (author) / Birleanu, C. (author) / Rymuza, Z. (author)

    Published in:

    INTERNATIONAL JOURNAL OF MATERIALS RESEARCH ; 104 ; 408-414

    Publication date:

    2013-01-01

    Size:

    7 pages

    ISSN:

    1862-5282

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  669.9

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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