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    Room temperature plasma oxidation in DCSBD: A new method for preparation of silicon dioxide films at atmospheric pressure

    New search for: Skacelova, D.
    New search for: Danilov, V.
    New search for: Schafer, J.
    New search for: Quade, A.
    New search for: Stahel, P.
    New search for: Cernak, M.
    New search for: Meichsner, J.

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    Room temperature plasma oxidation in DCSBD: A new method for preparation of silicon dioxide films at atmospheric pressure

    New search for: Skacelova, D.
    New search for: Danilov, V.
    New search for: Schafer, J.
    New search for: Quade, A.
    New search for: Stahel, P.
    New search for: Cernak, M.
    New search for: Meichsner, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Room temperature plasma oxidation in DCSBD: A new method for preparation of silicon dioxide films at atmospheric pressure

    New search for: Skacelova, D.
    New search for: Danilov, V.
    New search for: Schafer, J.
    New search for: Quade, A.
    New search for: Stahel, P.
    New search for: Cernak, M.
    New search for: Meichsner, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Room temperature plasma oxidation in DCSBD: A new method for preparation of silicon dioxide films at atmospheric pressure

    Contributors:

    Skacelova, D. (author) / Danilov, V. (author) / Schafer, J. (author) / Quade, A. (author) / Stahel, P. (author) / Cernak, M. (author) / Meichsner, J. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B ADVANCED FUNCTIONAL SOLID STATE MATERIALS ; 178 ; 651-655

    Publication date:

    2013-01-01

    Size:

    5 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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